ASML, TSMC, and imec Fabricate Complementary 2D-Material Transistors at 50nm Pitch on a Full 300mm Wafer
At the 2026 VLSI Symposium, imec and partners reported MoS2 and WS2/WSe2 transistors at a 50nm contacted poly pitch with 94% of devices operational, a step toward post-silicon logic.